Advantages
- Enhances target resonance performance without complex electrode reshaping or fabrication changes
- Suppresses spurious vibration modes to improve signal clarity and device reliability
- Compatible with existing MEMS processes, reducing redesign time and manufacturing risk
- Applicable across multiple MEMS materials, geometries, frequencies, and device architectures
Summary
MEMS resonators used in timing, sensing, and communication systems often suffer from spurious vibration modes that degrade performance, reduce quality factor, and complicate mode selection. Conventional electrode designs lack flexibility to selectively strengthen desired resonance modes, forcing designers to rely on complex geometries, increased fabrication costs, and iterative redesigns that limit scalability and commercial deployment.
This technology introduces a strategic electrode rotation approach that selectively enhances desired vibration modes while suppressing spurious resonances through piezoelectric charge cancellation. Without changing electrode size or fabrication flow, the method improves resonator performance, stability, and mode selectivity. Validated through simulation and experiments, it offers a scalable, low-risk solution for high-performance MEMS resonator products.
Conceptual visualization of electrode orientation optimization in MEMS resonator design.
Desired Partnerships
- License
- Sponsored Research
- Co-Development