Advantages
- Improves resonator precision and quality using localized Joule heating
- Enables post-fabrication tuning without redesign or full re-manufacture
- Enhances performance by lowering motional resistance and boosting Q factor
- Works with a wide range of MEMS materials and device shapes
Summary
MEMS resonators are widely used in precision filtering, timing, and sensing devices, but fabrication imperfections often lead to small frequency mismatches and inconsistent performance. Traditional tuning methods either degrade performance or require complex designs, increasing cost and time.
This technology introduces a localized annealing process using controlled Joule heating to precisely adjust the frequency and improve performance after fabrication. By applying a current through the MEMS structure, the system induces material changes that permanently enhance the resonator’s stiffness, reduce insertion loss, and increase the quality factor. Demonstrated on both rectangular and disk-shaped TPoS resonators, this method is scalable, precise, and compatible with existing MEMS production, opening new doors for high-precision RF filtering, stable timing, and microscale sensor technologies.
This image shows how localized Joule heating is applied through a DC current to fine-tune MEMS resonators. The heat alters mechanical properties without redesigning the device, enabling precise frequency trimming and improved performance.
Desired Partnerships
- License
- Sponsored Research
- Co-Development